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<div id="mainlft"> <div id="editorInfo" class="floatedit" style="position: absolute; display: none"> <div class="floatedit01"> <img src="/images/fediter01.gif"> </div> <div class="floatedit02"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tbody> <tr> <td rowspan="3"> <a href="#" target="_blank"> <img src="http://img.icpcw.com/Editor/40.jpg" border="0" width="50px" height="50px"></a> </td> <td> <a href="http://www.wrsxy.com/" target="_blank">??/a> </td> </tr> <tr> <td> <a href="" target="_blank">??/a> </td> </tr> <tr> <td> <a href="/EditorArticle/40/" target="_blank">他的文章</a> </td> </tr> </tbody> </table> </div> <div class="floatedit01"> <img src="/images/fediter03.gif"> </div> </div> <div class="sub4lft"> <div class="sub4textit"> 国光刻机破?首台产品于q内交付 </div> <div class="tabtit0523"> <ul> <li class="zhengwen"><a href="/Information/Industry/News/3355/335527.htm">正文</a></li> <li class="this" id="commentBar"><a href="/Comment_335527.html" style="text-decoration: none">我来说两?span>(已有<span class="fcred commentNum">0</span>人参?/span><span>)</span></a></li> </ul> </div> <div class="sub4textexpl"> <ul> <li>2021/9/26 11:49:40</li> <li>cdQ原?/li> <li>来源Q?span>电脑?/span></li> <li>报纸~辑Q?a id="editor" href="/EditorArticle/40/" style="text-decoration: underline; color: blue;">电脑?/a></li> <li>作者:</li> </ul> </div> <div class="sub4summary"> 【电脑报在线】半g产业的核心在于制造,刉的核心在于讑֤? </div> <div class="sub4text"> <p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">芯片刉之母,无比重要的光L</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在芯片制造O长的产业链中Q光L是最眼的明珠Q它代表了科技发展的顶U水qI另一个是航空发动机)Q更是芯片制造中必不可少的精密设备。在半导体领域,光刻Z为前道工Z大设备之首(光刻机、刻蚀机、镀膜设备、量设备、清z机、离子注入机、其他设备)Qh值含量极大,技术要求极高?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">我们使用的几乎所有的电子讑֤都会使用芯片Q而芯片制造的q程有:片的制备--〉外延工艺--〉热氧化Q?〉扩散掺杂--〉离子注入--〉薄膜制备--〉光刻--〉刻蚀Q?〉工艺集成等?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在同样大的芯片刉过E中中,惌晶体的数量增多Q就需要从芯片的精l结构下手,如果芯片的制造能够越来越_Q达到相M个期间之间的距离辑ֈ几纳c的情况Q芯片所能容U的集体会更多。那么对于精l结构的刉,该怎么才能做到呢?目前L的是采用攑֤的思想Q通过刉一个放大的模板Q即掩膜Q,光通过模板照到片上,q也是光L的核心技术?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.64376130198915" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.26px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.26px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(136, 136, 136); font-size: 12px; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; overflow-wrap: break-word !important;">?/span>囄来源Q英特尔官方|站</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在集成电路制造工ZQ光L军_集成电\集成度的核心工序。光ȝ原理是在片表面覆盖一层具有高度光敏感性的光刻Ӟ再用光线Q一般是紫外Uѝ深紫外Uѝ极紫外U)透过掩模照射在硅片表面,被光U照到的光刻胶会发生化学反应。此后用特定昑֪液洗去被照射/未被照射的光刻胶Q就实现了电路图从掩模到片的{UR一般的光刻工艺要经历旋转涂胶、Y烘、对准与曝光、曝光后烘焙、显影、坚膜烘焙、显影检查等工序?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5523465703971119" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png" data-type="png" data-w="554" _width="553.66px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.66px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">?/span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">囄来源Q北京华卓精UIPO说明?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是完成光刻工艺的半g讑֤。光L主要包括光源、投q镜和工gC个子pȝ及其他部件。其中,光源pȝ的主要作用ؓ发出W合光刻要求的激光,投媄物镜pȝ的主要作用ؓ对光源发出光U进行精准聚焦,双工件台的主要作用ؓ承蝲片q根据光刻需求进行精密运动,其决定了光刻机的分L率和生效率?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">l过多年的发展,光刻机按光源cd可分Zc:I-line 光刻机、KrF 光刻机、ArF 光刻机、ArFi 光刻机(?ArF 没式光LQ与 ArF 光刻机相比在曝光q程中在投媄物镜和晶圆之间Ş成了一层水膜)、EUV 光刻机;按照应用领域可分?IC 前道光刻机和 IC 后道光刻机。其中,IC 前道光刻Z要应用于芯片刉,而后道光L主要用于芯片装?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020q光L市场规模U?51亿美元,在整个半g讑֤中占比约21%Q涂胶显p备市模约19亿美元,在整个半g讑֤中占比约3%Q干法去胶设备市模约6亿美元,在整个半g讑֤中占比约1%?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">从市值来看,光刻机在整个半导体领域所占比重ƈ不高Q但作ؓ最上游的“母机”,光刻机对整个半导体生态的影响是巨大的?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">光刻Z痛,中外差距巨大</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在实际半g生q程中,一个芯片的产生要经历几十次光刻才能完成Q有些结构层甚至需要多ơ光L能Ş成。光L芯片刉的核心Q是IC刉的最关键步骤Q它定了芯片的关键寸。在L的微电子刉过E中Q光L最复杂、昂贵和关键的工艺,其成本约占整个硅片加工成本的三分之一甚至更多。同时光L也是不可替代的,光刻成本占到了芯片整体制造工艺的40%?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而,在半g讑֤中最为重要的一环——光L讑֤Q最先进的技术基本被阿斯麦、佳能及康三大国际大厂垄断Q其中阿斯麦QASMLQ几乎在EUVQ极紫外光刻Q领域是垄断的,它垄断了全球14nm以上的高端光L市场Q特别是7nm以上光刻机更?00%垄处于垄断地位?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.628158844765343" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png" data-type="png" data-w="554" _width="553.61px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.61px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着光源、曝光方式不断改q,光刻机前后共l历?代品,每一代品都在不断降低光 源L长,同时~小制程U宽。第四代入式光LQ最高制E可?nmQ在7nm之后必须 使用W五代EUV光刻机,光用EUV光源QL长ؓ13.5nmQ制E节点ؓ7-3nmQ是目前最先进的光L。而国内能与国际大厂正面抗衡的企业Q暂时还没有?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">不少国hW一ơ高度关注和重视光刻机可以追溯到2018q_当年5月,中芯国际向ASML下单一Ch?.2亿美元的EUV光刻机,预计2019q底交付Q?020q进行安装?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">几乎同时Q特朗普政府向荷兰政府发出威胁,不得向中国交付这台EUV光刻机,否则国政府断供该光刻Z的美国部Ӟq在2019q明向h表态:“好的盟友不会向中国出售q类讑֤”?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2019q?1月,ASML宣布Q荷兰政府不再箋{兛_口许可,向中芯国际出售EUV光刻机的计划正式l止?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5782747603833865" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png" data-type="png" data-w="626" _width="553.742px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.742px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">q意味着Q中国大陆的芯片厂商无法H破芯片10nm制程。而早?017q_国旗舰手机的芯片制E就已经来到10nm。到2021q_各品牌的旗舰手机芯片制程已经普遍使用5nm技术。也是_中国大陆无法自电子产品所需要的先进制程芯片。这对中国大陆的半导体芯片制造业,无疑是一个巨大的压制和打凅R?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">一?2亿h民币Q备受追捧的EUV光刻?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">拥有先进的光LQ意味着拥有刉先q制E芯片的潜力Q而EUV光刻机成一切的关键所在?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着半导体技术的更新换代Q光L也从最开始的gU(436nmQ逐渐发展十年间兴LEUV光刻机,从接触式向接q式Q最后演变成步进式ؓ丅REUV光刻机,又称极外线光刻机,是芯片生产工P是生产大规模集成电\的核心设备,对芯片工艺有着军_性的影响Q其中,于5U米的芯片晶圆,只能用EUV光刻机生产?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.45027124773960214" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.48px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.48px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">作ؓ全球唯一一家能EUV光刻机的厂家QASML自然获得了大量的订单Q截止至2019q第二季度,ASML的NEX:3400B EUV光刻机的装机数量已经多达38収ͼ而下半年他们推出了效率更高的NEX:3400C光刻机?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">?019q?全年一׃付了26套EUV光刻机,Z们带来了27.89亿欧元的收入Q占了全q收入的31%Q而全q卖?2台的ArFiq外线光刻机才q̎47.67亿欧元,可见一套EUV光刻机是多么地赚钱?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6799276672694394" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">10?4日,ASML总裁兼首席执行官Peter Wennink在介l公怸季度业WӞ_“我们第三季度的新增订单辑ֈ?9亿欧元,其中5.95亿欧元来?台EUV讑֤。”由此估,一台EUV光刻机的售h高达1.48亿欧元,折合人民?1.74亿元?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">q个h有多贵呢Q按波音公司2014q品目录公布的hQ一架L音B787飞机的零售h?.571亿美元,按现在的汇率计算Q大U合人民?7.3亿元人民币?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">ASML财报数据昄Q?020q_阿斯麦占据全球EUV光刻机出货的100%Q占全球q外光LQDUVQ出货的62%Q剩下的份额由尼康和佌瓜分。目前,阿斯麦最C代极紫外光刻机TWINSCAN NXE:3600D已交付给客户Q相较于前一代品,该机型生产力提高15%-20%Q套ȝ度提?0%</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而,在全球发生大规模“芯荒”之后,国和欧z各国政府已集中_֊增强本国的芯片制造能力,q导致了政府对该行业的直接支持。美国参议院上个月通过一Ҏ案,要求提供520亿美元的补脓来支持国内芯片生产?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">《华街日报》指出,EUV光刻Z能很快地装配在一P随着全球芯片产能的扩张,阿斯麦的光刻机开始出C不应求,客户有时甚至会要求在没有q行全面试的情况下发货?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.46835443037974683" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.28px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.28px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">q种情况Q也让阿斯麦有底气说出,即便暂时无法向中国大陆出货,其营收也不会受到影响Q“我们的客户渴望得到q些机器”!</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">事实上,从EUV光刻生出来那一d始,EUV光刻机就面着~问题Q一斚w是ASML产能低,另外一斚w是EUV光刻机需求巨大。据悉,三星和台U电是目前芯片制造技术最先进的厂商,两者一直都购买更多EUV光刻机,甚至三星李在镕都亲自去ASML协商购买更多EUV光刻机?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">另外Q英特尔也在购买更多EUV光刻机,其是英特尔宣布q入晶圆代工领域Q还?025q重回芯片制造领域中的第一名后Q其对EUV光刻机的需求更是直U增加?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">遗憾的是Q根据ASML发布的数据显C,今年上半q仅交付?0台EUV光刻机,q积压了大量的EUV光刻单,订单金额高达几十亿欧元。该数据昄QEUV光刻研发出来QASML一直都在想办法提升产能Q但q么多年q去了,ASMLp100余台EUV光刻机,今年q能仅?5台?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">昄QEUV光刻Z不应求的局面短旉内无法改变,国内光刻机市场状况又如何呢?</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">奋力q赶Q一步一个脚?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">国内半导体业用的光刻机和国际先进企业使用的光LI竟有多大区别呢Q?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2015q_q、三星、台U电购入ASMLZ?0nm制程EUV光刻机,领先q入10nm时代。而反观中芯国际历艰辛,只能买到ASML?010q生产的32nm光刻机,整整落后?q?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.3471971066907776" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png" data-type="png" data-w="553" _width="552.54px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 552.54px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:台积电官|?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">5q的旉对于半导体业来_已经_更新换代三次Q按照公开披露的数据,2014q华为的研发l费?5亿美元,是台U电的三倍以上。按照中国半g行业业内的共识,如果中国大陆能像台湾省、韩国一栯q最先进的EUV光刻机,中国大陆能够在短旉内追q世界顶的半导体制造水q?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在外购\途不畅的情况下,自研H破锁成ؓ国hx的焦炏V?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">早在2002q_光刻机就正式列入?63重大U技d计划”。这一q_U技部和上v市政府共同牵_国内多家企业共同l徏了上微电子Q重点研?00nm步进扫描投媄光刻机?008q国家启动了L装备、材料和工艺{配套能力的?2专项”,扶持国内光刻Z业链。除了上微电子负责整机刉,q扶持了一扚w套企业的研发Q比如长春光甉|、上光甉|和国U精密研I曝光光学系l,华卓_承担双工件台Q南大光늠制光刻胶Q启机电负责突破DUV光刻机液系l等?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">如今Q国产光L在艰难中已有了星星之火。十余年的持l投入下Q国内业链在光源系l、曝光光学系l等斚w取得H破?016q_国科_֯研发的国内首套用于高?IC 刉的 NA=0.75 投媄光刻机物镜系l、国望光学研发的首套90nm节点ArF投媄光刻机曝光光学系l都已交付?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.8028933092224232" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.33px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.33px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:上v微电子官|?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在国产光L技术领域,上v微电子(SMEEQ一枝独U。其产品主要采用ArF、KrF和i-line光源Q目前只能达?0nm制程Q且主要用于IC的后道封装和面板领域。SMEE作ؓ国内最领先的光L研发企业Q有非常多的光刻工艺人才Q在产业链还未成熟的国内光刻业中Qh才优势是主要核心竞争力。作片行业的上游Q目前国内还未出现能刉出能满片行业需求的企业Q而有着众多光刻工艺人才的SMEEQ自然而然成为最有竞争优势的企业?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020q?月初Q上微电子宣布在2021-2022q交付第一?8nm工艺的国产浸入式光刻机,国光刻机有望从此前?0nm工艺一丄破到28nm工艺?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6473779385171791" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="囄" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源:上v微电子官|?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2021q??8日,上v微电子D行新产品发布会,宣布推出SSB520型新一代大视场高分辨率先进装光刻机。据上微电子官网信息昄Q新一代封装光L品投q镜系l全面升U,可满?.8μm分L率光d艺需求,极限分L率可?.6μmQ通过升q动、量和控制pȝQ套ȝ度提升至?00nmQƈ能保持长期稳定性?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">同时Q上微电子预计会在2021q年底交付采用ARF光源制程工艺?8nm光刻机。此光刻机在l过多次曝光之后Q可生?1nm制程芯片。此前上微电子可量产光L受困?0nm制程辑֛q之久,如若成功交付28nm光刻机,打破光L国际巨头ASML公司常年Ҏ熟和先进制程领域的技术封锁?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">而近q来Q在国家政策的扶持以及一扚w头企业的带领下,我国光刻机技术也开始了飞速的发展Q由长春光机所牵头承担的国家科技重大专项02专项——“极紫外光刻QEUVLQ关键技术研I”项目也利完成了验收前现场试。中U院光电技术研I所承担的“超分L率光刻装备研制”项目通过验收、南大光甉|担的国家U技重大专项Q?2专项Q“极大规模集成电路制造装备及成套工艺”之“先q光刻胶产品开发与产业化”项目通过验收……在国h共同的努力下Q光L昄有了弯道R的可能?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">正如ASML总裁皮特·韦尼克说Q“出口管制将加快中国自主研发Q?5q时间里他们做出所有的东西”、“中国完全自L控供应链之后Q欧z供应商彻底失d场”,但短旉内国产光L技术想q上阿斯麦、佳能及康{拥有十几二十年技术沉淀的大厂,隑ֺ是不的。毕竟,我们在进步,别h不会选择固步自封。此外,即拥有了相应的技术,相关国雉件等产业链技术也要跟得上才行?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">写在最后:用业的力量LH破</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是技术壁垒极高的产品Q而EUV光刻机制造更是“难上加䏀,不仅体现在技术设计方面,q在于零部g供应Q一台顶的EUV光刻机包含了10万多个零部gQ全球供应商过5000Ӟ从光L的结构分析来看,国光源?7%Q荷兰腔体和英国真空部g?2%Q日本材料占27%Qd国光学系l占14%。因此,仅从雉件供应来_光刻机涵盖的产业铑ְ十分庞大?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而,我国不仅有着高速发展的半导体行业,更有同光L密切相关且快速成长且的晶圆业。根?SEMI l计Q中国计划在 2017 q至 2020 q间建立一个强大、自l自的半导体供应链Q中国的晶圆刉能在 2020 q达?400 万片Q?英寸Q。晶圆能的快速增长促q了半导体设备需求的增长。根?SEMI l计Q?020q中国半g讑֤行业市场规模?187.20 亿美元,同比增长 39.18%?009 q至 2020 q_中国半导体设备行业市模复合增长率?31.25%Q高于全球市场增长率 14.59%?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">l过多年培育Q国产半g讑֤已经取得重大q展Q整体水q?28nm 制程Qƈ?14nm ?7nm 制程实现了部分设备的H破。先q制EUؓ了保证品良率,我国晶圆厂仍以采购外讑֤ZQ待国讑֤通过客户验证且下游客户能顺利爬坡后Q国产设备占比有望提升;而在中低端制E,国化率有望得到显著提升?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微Y雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">除传l硅基晶圆制造外QSiC {第三代宽禁带半g材料研发发成熟QSiC器g的需求将逐渐增多Q将会带动宽带半导体材料晶圆制造U的Q进一步促q对半导体设备的需求,而这些,都将成ؓ国光刻机成长的“沃土”!</span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; color: rgb(178, 178, 178); font-size: 12px; letter-spacing: 0.544px; overflow-wrap: break-word !important;">Q编辑:</span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; color: rgb(178, 178, 178); font-size: 12px; letter-spacing: 0.544px; overflow-wrap: break-word !important;">崔崔Q?/span></p> </div> <div class="invest" id="vote" style="display: none"> </div> <div class="s4pg martop10"> <div class="pager"> </div> </div> <div class="sub4frht"> 本文2021-09-20出版的《电脑报?021q第37?A.新闻周刊</br> (|站~辑Qadmin)</br> </br> </br> </div> </div> <div class="share"> <table> <tr> <td> <div class="bdsharebuttonbox"> <a href="#" class="bds_weixin" data-cmd="weixin" title="分n到微? style="float: right; padding-left: 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